Rates vary from an official's point of view across the board... My checks ranged from $75 (MS dual) up to $200 for a regular tournament... anything within that range from $140-$180 (regular official) and I'd guess $160-$200 (head offical) will be par for the course.
One club in particular handed us our check for $160 (I think it was) last year then another $20 bill because they added a bunch of extra kids due to another tournament getting cancelled and allowing them in that morning. In all honesty it's one of the best ran kid's tournaments I officiate (have since 2005-6 season).